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Metals like aluminum, gold and tungsten are used to create conductive layers on a device. They are generally applied with two different methods, evaporation and sputtering, grouped into the category of "physical vapor deposition", or PVD. |
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Evaporation uses heat (either an electric filament or an electron beam) and high-vacuum (between 5x10-5 Torr and 1x10-7 Torr) to vaporize the metal source. The evaporating source material condenses on the surface of the cooler wafers which are held in a semispherical or "planetary" arrangement over the source. Sputtering uses a cathode to create an argon plasma which bombards the source metal. The dislodged metal molecules are focused by a "lens" of radiation-absorbent material, called a collimator, and deposited in a thin film on the surface of the wafer. |
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